ForALL
COSMOS - A
HDP DECAP. SYSTEM [750mm x 800mm x 1,100mm]
Specification
(1) Process Chamber
- Material : Stainless steel 304 and Quartz
- Surface Treatment : Electric polished
- Circular Shape
- Volume : 6.3 liter @ 3.5'' substrate
(2) Diffusion Gun
- Material : Stainless steel 304
- Surface Treatment : Electric polished
- Circular Shape
- Same gas flow conductance on the all substrate area
(3) Substrate Holder
- Material : Stainless steel 304
- Surface Treatment : Glass beading
- Circular Shape : 3.5''
- Temperature : Depend on PCW
(4) Plasma Power Supply
- High density plasma activating method
- 13.56MHz 600W power supply
- 13.56MHz 1Kw auto matching network
- Interface : RC232 protocol
(5) Antenna
- Material : Silver coated Cu
- Shape : Helical
- Design : Lowest plasma damages
(6) Gas Delivery Module
- Standard [3ch] : O2,CF4,SF6
- Up to 6 channels
(7) Down Stream Auto Pressure Control
- Capacitance Manometer : 5x10 ~ 10 Torr
- 16bit analog to digiral convertor
- KF40 Throttle valve
(8) N2 cleaner
- Differential Pressure : 0.5 ~ 5 bar at gauge pressure
- Mode : Pulse/Continuous mode
- Flow rate also controlled by manual or recipe
(9) Digital Micro Scope
- With a zoom lens and a 1x1/2'' CCD camera
- Standard : 20x ~ 200x
(10) Pump
- Oil rotary pump with a oil mist trap
- Capacity : 550Liter/min
(11) Cold Particle Trap
- To separate powders and byproducts
- Material : Stainless steel mesh < 5um
(12) Option
- High resolution micro scope : 50x ~ 500x zoom lens
- End Point Detector
- CO2 Cleaner
- Milling / Polishing Equipment
- Bias 300watt plasma power supply for selectivity
- Gas detector